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Development of a New Hot Cathode Magnetron Gauge With Electric Field Controlling.

SHINKU
doi 10.3131/jvsj.42.827
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Abstract

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Date

January 1, 1999

Authors
Tatsuo ASAMAKITatsuya YAMAGUCHIHiroshi UDAGAWAMichiro TAKEUCHITakashi UCHIYAMAYukiko KAMATAAsami HOTOTA
Publisher

The Vacuum Society of Japan


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