Excitation Dynamics in Electrically Asymmetric Capacitively Coupled Radio Frequency Discharges: Experiment, Simulation, and Model

Plasma Sources Science and Technology - United Kingdom
doi 10.1088/0963-0252/19/4/045028
Full Text
Abstract

Available in full text

Date
Authors
Publisher

IOP Publishing

Related search

Power Absorption in Electrically Asymmetric Dual Frequency Capacitive Radio Frequency Discharges

Physics of Plasmas
Condensed Matter Physics
2011English

Capacitively Coupled Radio-Frequency Hydrogen Discharges: The Role of Kinetics

Journal of Applied Physics
AstronomyPhysics
2007English

Electron Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Oxygen Discharges

Plasma Sources Science and Technology
Condensed Matter Physics
2013English

Experimental and Computational Investigations of the Effect of the Electrode Gap on Capacitively Coupled Radio Frequency Oxygen Discharges

Physics of Plasmas
Condensed Matter Physics
2019English

Breakdown Mechanism of Capacitively Coupled RF Discharges

IEEJ Transactions on Fundamentals and Materials
Electronic EngineeringElectrical
1998English

Observations of Electron Energy Distribution Functions and Ion Bombardment Secondary Electrons in a Capacitively Coupled Radio Frequency Plasma

IEEJ Transactions on Fundamentals and Materials
Electronic EngineeringElectrical
1999English

Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures

Journal of Applied Physics
AstronomyPhysics
1999English

Electron Heating by Sheaths in Radio Frequency Discharges

Journal of Applied Physics
AstronomyPhysics
1992English

Spatial Behavior of Energy Relaxation of Electrons in Capacitively Coupled Discharges: Comparison Between Ar and SiH4

Journal of Applied Physics
AstronomyPhysics
2000English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy