Two-Dimensional Simulation of a Miniaturized Inductively Coupled Plasma Reactor

Journal of Applied Physics - United States
doi 10.1063/1.1644043
Full Text
Abstract

Available in full text

Date
Authors
Publisher

AIP Publishing

Amanote Research

Note-taking for researchers

Follow Amanote

© 2025 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy