Platinum and Palladium Oxalates: Positive-Tone Extreme Ultraviolet Resists
Journal of Micro/ Nanolithography, MEMS, and MOEMS - United States
doi 10.1117/1.jmm.14.4.043511
Full Text
Open PDFAbstract
Available in full text
Categories
Date
December 24, 2015
Authors
Publisher
SPIE-Intl Soc Optical Eng