1-Nm Si Patterning: Patterning Si at the 1 Nm Length Scale With Aberration-Corrected Electron-Beam Lithography: Tuning of Plasmonic Properties by Design (Adv. Funct. Mater. 52/2019)

Advanced Functional Materials - United Kingdom
doi 10.1002/adfm.201970353
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Wiley

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