Pulse Drive and Capacitance Measurement Circuit for MEMS Electrostatic Actuators

Analog Integrated Circuits and Signal Processing - Netherlands
doi 10.1007/s10470-008-9166-9
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Springer Science and Business Media LLC

Related search

Smart Drivers for Online Diagnosis of Electrostatic MEMS Actuators

2010English

Merging Parallel-Plate and Levitation Actuators to Enable Linearity and Tunability in Electrostatic MEMS

Journal of Applied Physics
AstronomyPhysics
2019English

On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers

Sensors
InstrumentationInformation SystemsElectronic EngineeringBiochemistryAnalytical ChemistryMolecular Physics,ElectricalAtomicMedicineOptics
2019English

Negative Capacitance for Electrostatic Supercapacitors

Advanced Energy Materials
Materials Sciencethe EnvironmentSustainabilityRenewable Energy
2019English

Capacitance Matrix and Electrostatic Energy

English

Advances in Measurement and Analysis of Electrostatic Discharge Significance of Human Body Capacitance

Environmental Engineering and Management Journal
ManagementMonitoringPolicyLawEnvironmental EngineeringPollution
2013English

Microfabricated Electrostatic Actuators for Hard Disk Drives

IEEE/ASME Transactions on Mechatronics
ControlSystems EngineeringComputer Science ApplicationsElectricalElectronic Engineering
1998English

Topology Optimization of Electrostatic MEMS

2004English

In-Package MEMS-based Thermal Actuators for Micro-Assembly

Journal of Micromechanics and Microengineering
Mechanics of MaterialsElectronic EngineeringMechanical EngineeringNanoscienceOpticalElectricalMagnetic MaterialsNanotechnologyElectronic
2006English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy