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Process Modules for GeSn Nanoelectronics With High Sn-Contents
doi 10.1109/ulis.2016.7440043
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Date
January 1, 2016
Authors
C. Schulte-Braucks
S. Glass
E. Hofmann
D. Stange
N. von den Driesch
Q.T. Zhao
D. Buca
S. Mantl
J.M. Hartmann
Z. Ikonic
Publisher
IEEE
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