Theoretical Analysis on a Microwave-Discharge-Pumped KrF Excimer Lamp
IEEJ Transactions on Electronics, Information and Systems - Japan
doi 10.1541/ieejeiss1987.111.3_129
Full Text
Open PDFAbstract
Available in full text
Date
January 1, 1991
Authors
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)