Preparing for the Next Generation of EUV Lithography at the Center for X-Ray Optics

Synchrotron Radiation News - United Kingdom
doi 10.1080/08940886.2019.1634432
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Informa UK Limited

Related search

EUV Light Sources for Next-Gen Lithography

Optics and Photonics News
Electronic EngineeringCondensed Matter PhysicsElectronicMolecular Physics,OpticalElectricalAtomicMagnetic MaterialsOptics
2018English

Center for X-Ray Optics, 1991

1992English

Fabrication and Testing of Optics for EUV Projection Lithography

1998English

FY06 LDRD Final Report Next-Generation X-Ray Optics: Focusing Hard X-Rays

2007English

Next-Generation Lithography

Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic EngineeringCondensed Matter PhysicsMechanical EngineeringElectronicMolecular Physics,NanoscienceOpticalElectricalAtomicMagnetic MaterialsNanotechnologyOptics
2007English

Next Generation X-Ray Detectors for In-House XRD

Powder Diffraction
InstrumentationRadiationCondensed Matter PhysicsMaterials Science
2008English

Laboratory for X-Ray Optics

1988English

Full-Shell X-Ray Optics Development at NASA Marshall Space Flight Center

Journal of Astronomical Telescopes, Instruments, and Systems
ControlSystems EngineeringMechanical EngineeringInstrumentationSpaceOpticalPlanetary ScienceMagnetic MaterialsAstrophysicsAstronomyElectronic
2019English

X-Ray Testing at PANTER of Optics for the ATHENA and Arcus Missions

2019English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy