Attainment of Extreme High Vacuum (10-10Pa) by Titanium Getter Pump.
SHINKU
doi 10.3131/jvsj.31.315
Full Text
Open PDFAbstract
Available in full text
Date
January 1, 1988
Authors
Publisher
The Vacuum Society of Japan
Available in full text
January 1, 1988
The Vacuum Society of Japan