Microstructure and Electronic Properties of the Refractory Semiconductor ScN Grown on MgO(001) by Ultra-High-Vacuum Reactive Magnetron Sputter Deposition
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films - United States
doi 10.1116/1.581360
Full Text
Open PDFAbstract
Available in full text
Date
July 1, 1998
Authors
Publisher
American Vacuum Society