Application of Modified Motional Mode Decoupling Control Scheme for a Fine-Motion Stage With Three-Degrees-Of-Freedom.
Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C - Japan
doi 10.1299/kikaic.67.1859
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Date
January 1, 2001
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Japan Society of Mechanical Engineers