Application of Modified Motional Mode Decoupling Control Scheme for a Fine-Motion Stage With Three-Degrees-Of-Freedom.

Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C - Japan
doi 10.1299/kikaic.67.1859
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Japan Society of Mechanical Engineers


Related search