Application of Modified Motional Mode Decoupling Control Scheme for a Fine-Motion Stage With Three-Degrees-Of-Freedom.

Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C- Japan

doi 10.1299/kikaic.67.1859

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Mechanics of Materials

Mechanical Engineering

Manufacturing Engineering

Date

January 1, 2001

Authors

Publisher

Japan Society of Mechanical Engineers

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