Nanoimprint Lithography and Future Patterning for Semiconductor Devices

Journal of Micro/ Nanolithography, MEMS, and MOEMS - United States
doi 10.1117/1.3658024
Full Text
Abstract

Available in full text

Date
Authors
Publisher

SPIE-Intl Soc Optical Eng

Related search

Soft Photocurable Nanoimprint Lithography for Compound Semiconductor Nanostructures

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2008English

Metal Hierarchical Patterning by Direct Nanoimprint Lithography

Scientific Reports
Multidisciplinary
2013English

Combined Laser Interference and Photolithography Patterning of a Hybrid Mask Mold for Nanoimprint Lithography

Journal of Nanoscience and Nanotechnology
Materials ScienceCondensed Matter PhysicsNanoscienceBioengineeringNanotechnologyChemistryBiomedical Engineering
2011English

Selective Patterning of ZnO Nanorods on Silicon Substrates Using Nanoimprint Lithography

Nanoscale Research Letters
Materials ScienceNanotechnologyCondensed Matter PhysicsNanoscience
2011English

Advanced Solutions for Nanoimprint Lithography

Nanoindustry Russia
2016English

Patterning Poly(3-Hexylthiophene) in the Sub-50-Nm Region by Nanoimprint Lithography

IEEE Transactions on Nanotechnology
Electronic EngineeringNanotechnologyComputer Science ApplicationsElectricalNanoscience
2011English

Confinement and Flow Dynamics in Thin Polymer Films for Nanoimprint Lithography

Applied Physics Letters
AstronomyPhysics
2011English

Nanoimprint Lithography: Full Wafer Replication of Nanometer Features

2005English

Impact of Wafer Deformation on Pattern Fabrication for Thermal Nanoimprint Lithography

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2016English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy