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Optical and Electrical Properties of Pulsed-Laser-Annealed Thin Si Films
doi 10.1117/12.185421
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Date
September 9, 1994
Authors
J. Bischof
Johannes Boneberg
C. H. Dorfmueller
Manfred Keil
Martha C. Lux-Steiner
Paul Leiderer
Publisher
SPIE