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Modelling of Piezoelectric Actuator Based Nano-Positioning System Under Sinusoidal Excitation Using Multi-Polynomial Regression
Journal of Physics: Conference Series
- United Kingdom
doi 10.1088/1742-6596/13/1/023
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Categories
Astronomy
Physics
Date
January 1, 2005
Authors
Y Gao
S Tse
Publisher
IOP Publishing
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