Studi Plasma Immersion Ion Implantation (PIII) Dengan Menggunakan Target Tak Planar

Jurnal Fisika dan Aplikasinya
doi 10.12962/j24604682.v6i2.926
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Lembaga Penelitian dan Pengabdian kepada Masyarakat ITS

Related search

Target Temperature Simulation During Fast-Pulsing Plasma Immersion Ion Implantation

Journal of Physics D: Applied Physics
SurfacesUltrasonicsCondensed Matter PhysicsAcousticsOpticalMagnetic MaterialsFilmsCoatingsElectronic
2001English

Plasma Immersion Ion Implantation With Lithium Ions

2007English

Metal Plasma Immersion Ion Implantation and Deposition: A Review

Surface and Coatings Technology
SurfacesCondensed Matter PhysicsInterfacesMaterials ChemistryFilmsCoatingsChemistry
1997English

Surface Modification of Biomaterials Using Plasma Immersion Ion Implantation and Deposition

Interface Focus
BiochemistryBiophysicsBiomaterialsBioengineeringBiotechnologyBiomedical Engineering
2012English

Experimental Investigation of Hybrid-Evaporation-Glow Discharge Plasma Immersion Ion Implantation

Journal of Applied Physics
AstronomyPhysics
2005English

Nitrogen Incorporation Into Hafnium Oxide Films by Plasma Immersion Ion Implantation

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
EngineeringAstronomyPhysics
2007English

Magnetic Field Effect on the Sheath Thickness in Plasma Immersion Ion Implantation

Applied Physics Letters
AstronomyPhysics
2002English

Work Function Enhancement of Indium Tin Oxide via Oxygen Plasma Immersion Ion Implantation

Plasma Science and Technology
Condensed Matter Physics
2013English

Enhancement of Implantation Energy Using a Conducting Grid in Plasma Immersion Ion Implantation of Dielectric/Polymeric Materials

Review of Scientific Instruments
MedicineInstrumentation
2003English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy