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Multi-Level-Storage in Lateral SbTeN-based Phase-Change Memory With an Additional Top TiN Layer
doi 10.7567/ssdm.2008.j-7-4
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Date
September 26, 2008
Authors
Y. Yin
K. Ota
T. Noguchi
H. Sone
S. Hosaka
Publisher
The Japan Society of Applied Physics
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