Microwave Plasma Assisted VHF-PECVD of Micro-Crystalline Silicon

Materials Research Society Symposium - Proceedings - United States
doi 10.1557/proc-715-a19.7
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Cambridge University Press (CUP)

Related search

Silicon Carbon Nitride Thin Films Deposited by Pulsed Microwave Plasma Assisted Chemical Vapour Deposition

Journal of Applied Sciences
2017English

Synthesis and Characterization of Nanocrystalline Silicon Carbide Thin Films on Multimode Fiber Optic by Means 150 MHz VHF-PECVD

International Journal of Biosensors & Bioelectronics
2018English

Silicon Carbide Passive Heating Elements in Microwave-Assisted Organic Synthesis

English

Diamond Film Grown by Microwave Plasma-Assisted Vapor Deposition.

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
1987English

Effects of Photon Reabsorption Phenomena in Confocal Micro-Photoluminescence Measurements in Crystalline Silicon

Journal of Applied Physics
AstronomyPhysics
2017English

Pulsed PECVD for the Growth of Silicon Nanowires

2006English

Microwave-Plasma Synthesis of Nano-Sized Silicon Carbide at Atmospheric Pressure

Ceramics International
SurfacesOpticalMaterials ChemistryProcess ChemistryTechnologyMagnetic MaterialsFilmsCompositesElectronicCoatingsCeramics
2015English

Gallium Assisted Plasma Enhanced Chemical Vapor Deposition of Silicon Nanowires

Nanotechnology
Mechanics of MaterialsElectronic EngineeringMechanical EngineeringMaterials ScienceNanoscienceElectricalBioengineeringNanotechnologyChemistry
2009English

The Model Developed for Stress-Induced Structural Phase Transformations of Micro-Crystalline Silicon Films

Nano-Micro Letters
SurfacesElectronic EngineeringNanoscienceOpticalElectricalMagnetic MaterialsFilmsNanotechnologyElectronicCoatings
2010English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy