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Electrical Properties and Degradation Kinetics of Compensated Hydrogenated Microcrystalline Silicon Deposited by Very High‐frequency‐glow Discharge
Journal of Applied Physics
- United States
doi 10.1063/1.358992
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Categories
Astronomy
Physics
Date
January 15, 1995
Authors
R. Flückiger
J. Meier
M. Goetz
A. Shah
Publisher
AIP Publishing