From Amorphous to Microcrystalline Silicon Films Prepared by Hydrogen Dilution Using the VHF (70 MHz) GD Technique

Journal of Non-Crystalline Solids - Netherlands
doi 10.1016/s0022-3093(98)00329-9
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Elsevier BV

Related search

High Rate Growth of Microcrystalline Silicon by VHF-GD at High Pressure

Thin Solid Films
SurfacesAlloysOpticalInterfacesMetalsMaterials ChemistryMagnetic MaterialsFilmsCoatingsElectronic
2003English

PROPERTIES OF PURE SILICON AMORPHOUS FILMS PREPARED BY Rf-Bias SPUTTERING

Le Journal de Physique Colloques
1981English

Analysis of Controlled Mixed-Phase (Amorphous+microcrystalline) Silicon Thin Films by Real Time Spectroscopic Ellipsometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2009English

Passivation Effect of Amorphous Silicon Oxide Thin Films Studied by Hydrogen Evolution

2013English

Synthesis and Characterization of Nanocrystalline Silicon Carbide Thin Films on Multimode Fiber Optic by Means 150 MHz VHF-PECVD

International Journal of Biosensors & Bioelectronics
2018English

A Study of Electronic Defects in Hydrogenated Amorphous Silicon Prepared by the Expanding Thermal Plasma Technique

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2003English

Doping of Amorphous and Microcrystalline Silicon Films Deposited at Low Substrate Temperatures by Hot-Wire Chemical Vapor Deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2001English

Hydrogen Influence on Gallium Arsenide Thin Films Prepared by Rf-Magnetron Sputtering Technique

Brazilian Journal of Physics
AstronomyPhysics
2006English

Tritiated Amorphous Silicon Films and Devices

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
1998English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy