Dielectric, Ferroelectric and Piezoelectric Properties of Sputtered PZT Thin Films on Si Substrates: Influence of Film Thickness and Orientation
Semiconductor Physics, Quantum Electronics and Optoelectronics - Ukraine
doi 10.15407/spqeo5.01.078
Full Text
Open PDFAbstract
Available in full text
Categories
Date
March 5, 2002
Authors
Publisher
National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka)