Amanote Research
Register
Sign In
Evolution of Sputtering Target Surface Composition in Reactive High Power Impulse Magnetron Sputtering
Journal of Applied Physics
- United States
doi 10.1063/1.4977814
Full Text
Open PDF
Abstract
Available in
full text
Categories
Astronomy
Physics
Date
May 7, 2017
Authors
T. Kubart
A. Aijaz
Publisher
AIP Publishing