Amanote Research
Register
Sign In
Evolution of Sputtering Target Surface Composition in Reactive High Power Impulse Magnetron Sputtering
Journal of Applied Physics
- United States
doi 10.1063/1.4977814
Full Text
Open PDF
Abstract
Available in
full text
Categories
Astronomy
Physics
Date
May 7, 2017
Authors
T. Kubart
A. Aijaz
Publisher
AIP Publishing
Related search
Hysteresis-Free Reactive High Power Impulse Magnetron Sputtering
Thin Solid Films
Surfaces
Alloys
Optical
Interfaces
Metals
Materials Chemistry
Magnetic Materials
Films
Coatings
Electronic
High Power Impulse Magnetron Sputtering Discharge
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Investigation of Plasma Spokes in Reactive High Power Impulse Magnetron Sputtering Discharge
Journal of Applied Physics
Astronomy
Physics
Effect of Peak Power in Reactive High Power Impulse Magnetron Sputtering of Titanium Dioxide
Surface and Coatings Technology
Surfaces
Condensed Matter Physics
Interfaces
Materials Chemistry
Films
Coatings
Chemistry
Growth of HfN Thin Films by Reactive High Power Impulse Magnetron Sputtering
AIP Advances
Nanotechnology
Astronomy
Physics
Nanoscience
Deposition of Yttria-Stabilized Zirconia Thin Films by High Power Impulse Magnetron Sputtering and Pulsed Magnetron Sputtering
Surface and Coatings Technology
Surfaces
Condensed Matter Physics
Interfaces
Materials Chemistry
Films
Coatings
Chemistry
Plasma Potential Mapping of High Power Impulse Magnetron Sputtering Discharges
Journal of Applied Physics
Astronomy
Physics
SiNxCoatings Deposited by Reactive High Power Impulse Magnetron Sputtering: Process Parameters Influencing the Nitrogen Content
ACS Applied Materials & Interfaces
Medicine
Materials Science
Nanotechnology
Nanoscience
Silicon Oxynitride Films Deposited by Reactive High Power Impulse Magnetron Sputtering Using Nitrous Oxide as a Single-Source Precursor
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings