In Situ Measurement of Pressure and Friction During CMP of Contoured Wafers

Journal of the Electrochemical Society - United States
doi 10.1149/1.1904923
Full Text
Abstract

Available in full text

Date
Authors
Publisher

The Electrochemical Society

Related search

An in Situ Tribometer for Measuring Friction and Wear of Polymers in a High Pressure Hydrogen Environment

Review of Scientific Instruments
MedicineInstrumentation
2017English

Measurement of Intracompartmental Pressure, Berore, During and After Exercise.

Orthopedics & Traumatology
1993English

The Planning Spirit of the Special Issue of &Ldquo;Progress in In-Situ Measurement of Friction Interface”

Hyomen Kagaku
2017English

Effect of Subcutaneous Pressure on Interface Pressure Measurement During Compression Therapy

Veins and Lymphatics
2018English

In Situ Temperature Measurement During Oxide Chemical Mechanical Planarization

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2003English

Reducing Bias During Intraocular Pressure Measurement.

British Journal of Ophthalmology
Molecular NeuroscienceOphthalmologySensory SystemsCellular
1995English

Measurement of the Tip and Friction Force Acting on a Needle During Penetration

Lecture Notes in Computer Science
Computer ScienceTheoretical Computer Science
2002English

Absolute in Situ Measurement of Surface Dangling Bonds During A-Si:H Growth

Applied Physics Letters
AstronomyPhysics
2007English

Thermal Design and in Situ Temperature Measurement of Heterogeneous Material During Ultrafast Laser Scribing

Sensors and Materials
Materials ScienceInstrumentation
2019English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy