Temperature Rise of the Mask-Resist Assembly During LIGA Exposure.

doi 10.2172/920115

Full Text

Abstract

Available in

Date

November 1, 2004

Authors

Publisher

Office of Scientific and Technical Information (OSTI)

Related search

Estimation of Temperature Rise During Ion Milling of Samples

Microscopy and Microanalysis

Instrumentation

English

In Situ Analysis of the EUV Resist Pattern Formation During the Resist Dissolution Process

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Figure 6: Temperature Rise in the Cell Suspension During PEMF Treatment.

English

Studies of Temperature Rise in Subcutaneous Fat Tissue During RF-hyperthermia

Thermal Medicine(Japanese Journal of Hyperthermic Oncology)

English

Transient Temperature Measurements of Resist Heating Using Nanothermocouples

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Structural System to Resist Seismic Loads on High Rise Reinforced Concrete Structures

Open Journal of Civil Engineering

English

Optimization of Process Parameters During End Milling and Prediction of Work Piece Temperature Rise

Archive of Mechanical Engineering

Mechanics of Materials

Mechanical Engineering

English

Di (2-Ethylhexyl) Phthalate Exposure Impairs the microRNAs Expression Profile During Primordial Follicle Assembly

Frontiers in Endocrinology

English

Recent Rise of Temperature in Japan

Geographical Review of Japan

English