Amanote Research
Register
Sign In
Temperature Rise of the Mask-Resist Assembly During LIGA Exposure.
doi 10.2172/920115
Full Text
Open PDF
Abstract
Available in
full text
Date
November 1, 2004
Authors
Aili Ting
Publisher
Office of Scientific and Technical Information (OSTI)
Related search
Estimation of Temperature Rise During Ion Milling of Samples
Microscopy and Microanalysis
Instrumentation
In Situ Analysis of the EUV Resist Pattern Formation During the Resist Dissolution Process
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Figure 6: Temperature Rise in the Cell Suspension During PEMF Treatment.
Transient Temperature Measurements of Resist Heating Using Nanothermocouples
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Studies of Temperature Rise in Subcutaneous Fat Tissue During RF-hyperthermia
Thermal Medicine(Japanese Journal of Hyperthermic Oncology)
Structural System to Resist Seismic Loads on High Rise Reinforced Concrete Structures
Open Journal of Civil Engineering
Optimization of Process Parameters During End Milling and Prediction of Work Piece Temperature Rise
Archive of Mechanical Engineering
Mechanics of Materials
Mechanical Engineering
Di (2-Ethylhexyl) Phthalate Exposure Impairs the microRNAs Expression Profile During Primordial Follicle Assembly
Frontiers in Endocrinology
Endocrinology
Metabolism
Diabetes
Temperature of Aircraft Cargo Flame Exposure During Accidents Involving Fuel Spills