Studies of Novel Copolymers for Deep-Uv Photoresists. I. Synthesis and Properties of Poly(Styrene-Co-Silicon-Containing Maleimide)
Polymer Journal - United Kingdom
doi 10.1295/polymj.pj2005186
Full Text
Open PDFAbstract
Available in full text
Date
July 28, 2006
Authors
Publisher
Springer Science and Business Media LLC