Ta2O5 Thin Films Preparation of Reactive Neutral Beam Sputter. Study on Effects of N2 Gas.

SHINKU

doi 10.3131/jvsj.30.504

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Date

January 1, 1987

Authors

Takayuki OKAMOTO

Katsumi TAKIGUCHI

Masaaki YOSHITAKE

Publisher

The Vacuum Society of Japan

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