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Etch Characteristics of Optical Waveguides Using Inductively Coupled Plasmas With Multidipole Magnets
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
- United States
doi 10.1116/1.581840
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Categories
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Date
July 1, 1999
Authors
K. J. An
D. H. Lee
J. B. Yoo
J. Lee
G. Y. Yeom
Publisher
American Vacuum Society
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