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An Edge-From-Focus Approach to 3D Inspection and Metrology
doi 10.1117/12.2074757
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Date
February 27, 2015
Authors
Fuqin Deng
Jia Chen
Jianyang Liu
Zhijun Zhang
Jiangwen Deng
Kenneth S. M. Fung
Edmund Y. Lam
Publisher
SPIE
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