Atomic Layer Deposition: Effect of Various Oxidants on Reaction Mechanisms, Self-Limiting Natures and Structural Characteristics of Al2 O3 Films Grown by Atomic Layer Deposition (Adv. Mater. Interfaces 14/2018)
Advanced Materials Interfaces - United Kingdom
doi 10.1002/admi.201870070
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Date
July 1, 2018
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Wiley