Amanote Research
Register
Sign In
A New Dielectric Isolation Technology Using Molten Silicon Spin Deposition
doi 10.7567/ssdm.1989.a-5-2
Full Text
Open PDF
Abstract
Available in
full text
Date
January 1, 1989
Authors
S. Itoh
S. Tanabe
T. Usui
K. Akahane
E. Fujya
Y. Tahara
Y. Maeda
Publisher
The Japan Society of Applied Physics
Related search
Activity of Boron in Molten Silicon.
Shigen-to-Sozai
New Molten Salt Electrolysis Using Plasma Arc Electrode
International Journal of the Society of Materials Engineering for Resources
Materials Science
Chemical Engineering
Mechanical Engineering
Development of a Compact Radiography Accelerator Using Dielectric Wall Accelerator Technology
Investigation of Gold Nanostructures on Silicon Using Electrochemical Deposition Method
Journal of Al-Nahrain University Science
A Stacked Dielectric Film for a Silicon Microstrip Detector
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
High Energy Physics
Instrumentation
Nuclear
A New Approach to Molten Steel Refining Using Fine Gas Bubbles.
ISIJ International
Mechanics of Materials
Alloys
Materials Chemistry
Metals
Mechanical Engineering
Approaching Defect-Free Amorphous Silicon Nitride by Plasma-Assisted Atomic Beam Deposition for High Performance Gate Dielectric
Scientific Reports
Multidisciplinary
Addressable Electron Spin Resonance Using Donors and Donor Molecules in Silicon
Science advances
Multidisciplinary
Silicon Deoxidation Equilibrium of Molten Fe-Mo Alloy
ISIJ International
Mechanics of Materials
Alloys
Materials Chemistry
Metals
Mechanical Engineering
