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Surface Energy Induced Patterning of Organic and Inorganic Materials on Heterogeneous Si Surfaces
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
doi 10.1116/1.2804577
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Date
January 1, 2007
Authors
L. Tao
A. Crouch
F. Yoon
B. K. Lee
J. S. Guthi
J. Kim
J. Gao
W. Hu
Publisher
American Vacuum Society
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