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Porous SiOCH Post Plasma Damage Characterization Using Ellipsometric Porosimetry
doi 10.1063/1.3251211
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Date
January 1, 2009
Authors
C. Licitra
R. Bouyssou
T. Chevolleau
N. Rochat
F. Bertin
Erik M. Secula
David G. Seiler
Rajinder P. Khosla
Dan Herr
C. Michael Garner
Robert McDonald
Alain C. Diebold
Publisher
AIP
