A Fundamental Study of Wet Blast Processing : Solid Particle Size Effects on Surface Processing Properties of Monocrystalline Silicon Wafer(Machine Elements, Design and Manufacturing)

Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C - Japan
doi 10.1299/kikaic.76.422
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Japan Society of Mechanical Engineers

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