Ultra-Shallow Boron Profile Fitting Compensating for Surface Contamination by Utilizing Genetic Algorithms

doi 10.7567/ssdm.2003.p4-7
Full Text
Abstract

Available in full text

Date
Authors
Publisher

The Japan Society of Applied Physics

Related search

Time-Varying Multi-Regime Models Fitting by Genetic Algorithms

Journal of Time Series Analysis
UncertaintyApplied MathematicsStatisticsProbability
2010English

New Methods for Ultra-Shallow Boron Doping by Using Plasma, Plasma-Less and Sputtering

1995English

Fitting of Dust Spectra With Genetic Algorithms

Astronomy and Astrophysics
AstrophysicsAstronomyPlanetary ScienceSpace
2010English

Improving Simulation-Based Algorithms for Fitting ERGMs

Journal of Computational and Graphical Statistics
CombinatoricsUncertaintyStatisticsProbabilityDiscrete Mathematics
2012English

Utilizing Genetic Algorithms to Optimize Membership Functions for Fuzzy Weighted Association Rules Mining

Applied Intelligence
Artificial Intelligence
2006English

Contamination of Water in a Shallow Lake by Dioxins

Journal of Japan Society on Water Environment
2009English

Convolution Based Profile Fitting

Springer Series in Materials Science
Materials Science
2004English

A Minimax Fitting Algorithm for Ultra-Precision Aspheric Surfaces

Journal of Physics: Conference Series
AstronomyPhysics
2011English

Vibration Compensating Beam Scanning Interferometer for Surface Measurement

Applied Optics
2008English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2025 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy