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UV NIL Template Making and Imprint Evaluation

doi 10.1117/12.802746
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Abstract

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Date

October 24, 2008

Authors
Shiho SasakiTakaaki HirakaJun MizuochiAkiko FujiiYuko SakaiTakanori SutouSatoshi YusaKoki KuriyamaMasashi SakakiYasutaka MorikawaHiroshi MohriNaoya Hayashi
Publisher

SPIE


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