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UV NIL Template Making and Imprint Evaluation
doi 10.1117/12.802746
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Date
October 24, 2008
Authors
Shiho Sasaki
Takaaki Hiraka
Jun Mizuochi
Akiko Fujii
Yuko Sakai
Takanori Sutou
Satoshi Yusa
Koki Kuriyama
Masashi Sakaki
Yasutaka Morikawa
Hiroshi Mohri
Naoya Hayashi
Publisher
SPIE
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