MEMS Electrostatic Actuation in Conducting Biological Media

Journal of Microelectromechanical Systems - United States
doi 10.1109/jmems.2009.2013398
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Related search

Topology Optimization of Electrostatic MEMS

2004English

A MEMS Electrostatic Particle Transportation System

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
1999English

Experimental Characterization of the Electrostatic Levitation Force in MEMS Transducers

Journal of Vibration and Acoustics, Transactions of the ASME
Mechanics of MaterialsAcousticsUltrasonicsMechanical Engineering
2020English

Smart Drivers for Online Diagnosis of Electrostatic MEMS Actuators

2010English

Multi-Component Single-Substrate Conducting Polymer Actuation Systems and Fabrication Techniques

2011English

Pulse Drive and Capacitance Measurement Circuit for MEMS Electrostatic Actuators

Analog Integrated Circuits and Signal Processing
SurfacesSignal ProcessingHardwareArchitectureFilmsCoatings
2008English

RF-MEMS Switch Structure for Low-Voltage Actuation and High-Density Integration

2007English

Low Actuation Voltage Totally Free Flexible RF MEMS Switch With Antistiction System

2008English

On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers

Sensors
InstrumentationInformation SystemsElectronic EngineeringBiochemistryAnalytical ChemistryMolecular Physics,ElectricalAtomicMedicineOptics
2019English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy