DMOTMDS/MTMOS Multi-Stacked SiOCH Films for Super-Low-K and Sufficient Modulus Formed by Damage-Free Neutral Beam Enhanced CVD

doi 10.7567/ssdm.2010.h-5-2
Full Text
Abstract

Available in full text

Date
Authors
Publisher

The Japan Society of Applied Physics

Related search

A New Structure of Nanodisk (Stacked Nanodisk) Fabricated by Bio-Nano-Process and Defect-Free Neutral Beam Etching

2009English

Effect of N2 Flow Rate on TiN Films Formed by DC Plasma CVD

Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Mechanics of MaterialsAlloysMaterials ChemistryCondensed Matter PhysicsMetals
1990English

Tribology of Carbonaceous Films Formed by Ion Beam Assisted Deposition.

Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
AlloysIndustrialMechanical EngineeringMetalsMaterials ChemistryManufacturing Engineering
1991English

On Some Sufficient Condition for the Equality of Multi-Clone and Super-Clone

Journal of Siberian Federal University - Mathematics and Physics
MathematicsAstronomyPhysics
2018English

Rendering Metals Ultralow Modulus and Nearly Hysteresis-Free and Linear Super-Elastic

Materials Horizons
Mechanics of MaterialsElectronic EngineeringMaterials ScienceElectricalProcess ChemistryTechnology
2019English

Synthesis of TiO2 Films by Laser CVD

Journal of the Ceramic Society of Japan
1989English

Ambient Air Synthesis of Multi-Layer CVD Graphene Films for Low-Cost, Efficient Counter Electrode Material in Dye-Sensitized Solar Cells

FlatChem
SurfacesOpticalMaterials ChemistryMagnetic MaterialsFilmsCompositesElectronicCoatingsCeramics
2018English

Ion Beam Enhanced Grain Growth in Thin Films

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
1986English

Formation of ZrO2 Films by Low Pressure CVD Using ZTI-O2 System and Evaluation of Corrosion Resistances of the Films

Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Mechanics of MaterialsAlloysMaterials ChemistryCondensed Matter PhysicsMetals
1992English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy