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Capacitively Transduced Micromechanical Resonators With Simultaneous Low Motional Resistance and Q > 70,000
doi 10.31438/trf.hh2010.127
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Date
June 6, 2010
Authors
M. Akgul
B. Kim
Z. Ren
C.T.-C. Nguyen
Publisher
Transducer Research Foundation
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