Probing the Dielectric Properties of Ultrathin Al/Al2O3/Al Trilayers Fabricated Using in Situ Sputtering and Atomic Layer Deposition

doi 10.1021/acsami.7b16506.s001
Full Text
Abstract

Available in full text

Date

Unknown

Authors

Unknown

Publisher

American Chemical Society (ACS)

Related search

In Situ Reaction Mechanism Studies of Plasma-Assisted Atomic Layer Deposition of Al2O3

Applied Physics Letters
AstronomyPhysics
2006English

Atomic Layer Deposition of Al-Doped ZnO Thin Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2013English

Iridium Wire Grid Polarizer Fabricated Using Atomic Layer Deposition

Nanoscale Research Letters
Materials ScienceNanotechnologyCondensed Matter PhysicsNanoscience
2011English

Charge Trapping Characteristics of Al2O3/Al-Rich Al2O3/SiO2 Stacked Films Fabricated by Radio-Frequency Magnetron Co-Sputtering

Thin Solid Films
SurfacesAlloysOpticalInterfacesMetalsMaterials ChemistryMagnetic MaterialsFilmsCoatingsElectronic
2011English

Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores

Nano Letters
Materials ScienceCondensed Matter PhysicsMechanical EngineeringNanoscienceBioengineeringNanotechnologyChemistry
2004English

Silicon Nanowire Heterojunction Solar Cells With an Al2O3 Passivation Film Fabricated by Atomic Layer Deposition

Nanoscale Research Letters
Materials ScienceNanotechnologyCondensed Matter PhysicsNanoscience
2019English

Competition Between Al2O3 Atomic Layer Etching and AlF3 Atomic Layer Deposition Using Sequential Exposures of Trimethylaluminum and Hydrogen Fluoride

Journal of Chemical Physics
MedicineTheoretical ChemistryAstronomyPhysicsPhysical
2017English

Electronic Properties of Thin HfO2Films Fabricated by Atomic Layer Deposition on 4h-SiC

Acta Physica Polonica A
AstronomyPhysics
2011English

Studies on Optical, Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Thin Films With Various Al Concentrations and Deposition Temperatures

Journal of Physics D: Applied Physics
SurfacesUltrasonicsCondensed Matter PhysicsAcousticsOpticalMagnetic MaterialsFilmsCoatingsElectronic
2011English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy