(PDF) Critical Dimension Metrology of a Plasmonic Photonic

Critical Dimension Metrology of a Plasmonic Photonic Crystal Based on Mueller Matrix Ellipsometry and the Reduced Rayleigh Equation

Optics Letters - United States

doi 10.1364/ol.42.002631

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Abstract

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Categories

Molecular Physics,

Date

June 29, 2017

Authors

Publisher

The Optical Society

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