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Surface Composition of BN, CN, and BCN Thin Films
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
- United States
doi 10.1116/1.581437
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Abstract
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Categories
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Date
September 1, 1998
Authors
A. Tempez
N. Badi
A. Bensaoula
J. Kulik
Publisher
American Vacuum Society
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