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Role of Implantation-Induced Defects in Surface-Oriented Diffusion of Fluorine in Silicon

Materials Science Forum
doi 10.4028/www.scientific.net/msf.175-178.545
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Abstract

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Date

November 1, 1994

Authors
Cs. SzelesB. NielsenP. Asoka-KumarKelvin G. LynnM. AnderleT.P. MaG.W. Rubloff
Publisher

Trans Tech Publications, Ltd.


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