Development of Exposure Method for Wiring Pattern on High Aspect Structures

IEEJ Transactions on Sensors and Micromachines- Japan

doi 10.1541/ieejsmas.125.280

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Abstract

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Categories

Electronic Engineering

Mechanical Engineering

Date

January 1, 2005

Authors

Yoshiaki Tamura

Yoshinori Matsumoto

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

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