Thin‐oxide Charging Damage to Microelectronic Test Structures in an Electron‐cyclotron‐resonance Plasma

Applied Physics Letters - United States
doi 10.1063/1.115360
Full Text
Abstract

Available in full text

Date
Authors
Publisher

AIP Publishing

Related search

Plasma Vacuum Ultraviolet Emission in an Electron Cyclotron Resonance Etcher

Applied Physics Letters
AstronomyPhysics
1999English

Plasma Expansion From a Dielectric Electron Cyclotron Resonance Source

Physica Scripta
Condensed Matter PhysicsOpticsMolecular Physics,Mathematical PhysicsAtomicAstronomyPhysics
2006English

Electron Cyclotron Resonance Microwave Ion Sources for Thin Film Processing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
High Energy PhysicsInstrumentationNuclear
1991English

Hydrogen-Free SiCN Films Obtained by Electron Cyclotron Resonance Plasma

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2007English

Production and Acceleration of Plasma by Electron Cyclotron Resonance (Coaxial Microwave Plasma Gun)

Kakuyūgō kenkyū
1969English

Electron Cyclotron Resonance Plasma Enhanced Direct Current Sputtering Discharge With Magnetic-Mirror Plasma Confinement

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
1997English

Cu Deposition Using a Permanent Magnet Electron Cyclotron Resonance Microwave Plasma Source

1994English

Operation of an Electron-Cyclotron-Resonance Ion Source With Supplemental Electron Injection

Physical Review Special Topics - Accelerators and Beams
2003English

Beam-Induced Damage to Thin Specimens in an Intense Electron Probe

Microscopy and Microanalysis
Instrumentation
2005English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy