Porous Silicon Bulk Micromachining for Thermally Isolated Membrane Formation
Sensors and Actuators, A: Physical- Netherlands
doi 10.1016/s0924-4247(97)01384-8
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May 1, 1997
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Elsevier BV
doi 10.1016/s0924-4247(97)01384-8
Available in
May 1, 1997
Elsevier BV