Ablation of Polymers by Focused EUV Radiation From a Table-Top Laser-Produced Plasma Source

Applied Physics A: Materials Science and Processing - Germany
doi 10.1007/s00339-011-6540-8
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Springer Science and Business Media LLC

Related search

Laser Produced Plasma for EUV Light Source for Lithography

The Review of Laser Engineering
2004English

Short-Pulse, Extreme-Ultraviolet Continuum Emission From a Table-Top Laser Plasma Light Source

Applied Physics Letters
AstronomyPhysics
1997English

Evaluation of Pressure in a Plasma Produced by Laser Ablation of Steel

Spectrochimica Acta, Part B: Atomic Spectroscopy
InstrumentationAnalytical ChemistryMolecular Physics,AtomicSpectroscopyOptics
2018English

Développement d'Une Source EUV Plasma Laser Pour La Micro-Lithographie

Journal de Physique IV (Proceedings)
2003English

Resonant Optical Pumping of C III by XUV Radiation From a CO2 Laser Produced Plasma.

The Review of Laser Engineering
1988English

Diagnostics of the Carbon Plasma Plume Produced by Laser Ablation of Graphite in Vacuum.

IEEJ Transactions on Electronics, Information and Systems
Electronic EngineeringElectrical
2003English

Table-Top Soft X-Ray Laser Interferograms of Dense Laser-Created Plasma

IEEE Transactions on Plasma Science
High Energy PhysicsNuclearCondensed Matter Physics
2002English

Laser System Design for Table-Top X-Ray Light Source

High Power Laser Science and Engineering
OpticsNuclear EnergyMolecular Physics,High Energy PhysicsEngineeringOpticalAtomicMagnetic MaterialsNuclearElectronic
2018English

Contact Microscopy Using a Compact Laser Produced Plasma Soft X-Ray Source

Acta Physica Polonica A
AstronomyPhysics
2016English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2025 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy