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Metal-Gate/High-Permittivity Dielectric Stack on Gallium Nitride Formed by Silane Surface Passivation and Metal-Organic Chemical Vapor Deposition
doi 10.7567/ssdm.2009.g-8-3
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Date
October 9, 2009
Authors
X. Liu
H. C. Chin
L. S. Tan
Y. C. Yeo
Publisher
The Japan Society of Applied Physics
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