Substrate-Biasing During Plasma-Assisted Atomic Layer Deposition to Tailor Metal-Oxide Thin Film Growth

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films - United States
doi 10.1116/1.4756906
Full Text
Abstract

Available in full text

Date
Authors
Publisher

American Vacuum Society

Related search

Growth Process Optimization of ZnO Thin Film Using Atomic Layer Deposition

Materials Research Express
SurfacesAlloysPlasticsPolymersMetalsOpticalBiomaterialsMagnetic MaterialsFilmsCoatingsElectronic
2016English

Frontispiece: Synthesis of Thin‐Film Metal Pyrites by an Atomic Layer Deposition Approach

Chemistry - A European Journal
Organic ChemistryCatalysisChemistry
2018English

Reaction Mechanisms During Plasma-Assisted Atomic Layer Deposition of Metal Oxides: A Case Study for Al2O3

Journal of Applied Physics
AstronomyPhysics
2008English

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2011English

Comparison of Thermal and Plasma-Enhanced Atomic Layer Deposition of Niobium Oxide Thin Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2018English

Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2006English

Review Article: Atomic Layer Deposition for Oxide Semiconductor Thin Film Transistors: Advances in Research and Development

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2018English

Hydrothermal Assisted Synthesis of Hierarchical Nanostructured Metal Oxide Thin Film

Journal of Nanomedicine & Nanotechnology
2015English

Hydrothermal Assisted Synthesis of Hierarchical Nanostructured Metal Oxide Thin Film

Journal of Nanomedicine & Nanotechnology
2015English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy