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Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics
doi 10.1364/cleo.2010.jtud17
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Date
January 1, 2010
Authors
M. M. Halim
A. Abdolvand
Y. Fan
S. K. Persheyev
C. Main
E. U. Rafailov
M. J. Rose
Publisher
OSA