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Technical Information. LIGA-A Technology for Production of Microcomponents and for Development of Microsystems.
Yosetsu Gakkai Shi/Journal of the Japan Welding Society
- Japan
doi 10.2207/qjjws1943.66.293
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Categories
Mechanics of Materials
Surfaces
Alloys
Mechanical Engineering
Metals
Films
Coatings
Date
January 1, 1997
Authors
W. Bacher
W. Menz
J. Mohr
Publisher
Japan Welding Society
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